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Resistivity vs thickness for c-axis single crystal Ru films deposited... | Download Scientific Diagram
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PDF] Growth and nanostructure of conformal ruthenium films by liquid-source metalorganic chemical vapor deposition by Sandwip Dey, Jaydeb Goswami, A. Das, Wei Cao, M. Floyd, Ray Carpenter · OA.mg · 10.1063/1.1576513
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